Wafer transfer system, wafer transfer method and automatic guided vehicle system

摘要

The present invention relates to a wafer transfer system which reduces time for orienting a wafer in transferring the wafer and improves the efficiency of transferring the wafer. The central position of a wafer 10 set on a place table 41 is calculated, the turn angle of a place table 41 when the wafer 10 is in the predetermined orientation is calculated based on the calculation result of the central position and positional information of an ID mark 11 received in advance and the quantity of expanding and contracting a transfer arm 30 and the turn angle of a turntable 39 are calculated for setting the wafer 10 such that the ID mark 11 is in the predetermined position and orientation to an optical character reader OCR 43, and the turn angle of the place table 41 calculated base on the turn angle of the turntable 39 is corrected, the place table 41 is turned only by the corrected turn angle and the wafer 10 is turned and transferred to the OCR 43 by the transfer unit 3 (Fig. 2).