Wafer boat with arcuate wafer support arms

摘要

A vertical ceramic wafer boat for supporting a silicon wafer having a predetermined radius R. The wafer boat comprises a base and a pair of column racks. The column racks extend generally vertically upwards from the base. Each column rack includes at least one arm having an arcuate section. Each arcuate section is sized to provide substantial support for a 0.7 R boundary region of the wafer and spans an arc of less than 180 degrees.