| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for test analysis that can automatically find out an optical testing condition to identify a cause of failure, even if a plurality of causes of failure coexist and are provided with new quantitative means and method that are hard to be affected by correlation between testing conditions and failure density and skill of an analyst. SOLUTION: A test analyzing device 1 is provided at least with a control means 10, a distribution type setting means 11, a testing means 12, an initial condition setting means 13, a characteristics extracting means 14, a characteristics comparing means 15, a test condition changing means 16, an analysis means 17, an output means 18, and a storing means 19. The test condition changing means 16 sets a correction testing condition which is different from a j-th inspection condition, j=j+1, when the comparison result outputted from the characteristics comparing means 15 does not agree, and the correction test conditions is newly set as the j-th test condition this is outputted to the testing means 12, and testing is executed again.
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