| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a sample sensitive to heat or a solvent for electron microscope observation. SOLUTION: This sample piece 6 is formed as follows: first grooves 4a, 4b are formed on a sample 1; a projection 3 is processed to have a roughly L-shaped section; the widths e, e' of the first grooves 4a, 4b are enlarged; second grooves 5a, 5b are formed orthogonally to the first grooves 4a, 4b; and the projection 3 is removed. Hereby, the sample piece 6 can be manufactured without requiring heat or cleaning by the solvent.
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