| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas humidifier preventing the water in a tank from splashing outside from the outlet of the tank as it is a liquid even in the case when the cross-sectional area in the tank of a wetter tank is reduced in order to miniaturize the whole device. SOLUTION: A gas humidifier is provided with a deionized water tank storing deionized water and a wetter tank storing the deionized water fed from the deionized water tank to humidify gas, and allows the gas introduced into the wetter tank to foam in water to humidify the gas due to the mass transfer between the bubbles and the water. After that, the gas humidifier feeds the humidified gas to a heat treating furnace outside the tank from the outlet of the tank provided at the upper part of the wetter tank. In the upper side of the surface of the deionized water 7 stored in the wetter tank 1, a mist preventing plate 3 having many small holes is installed to cover the surface of the water. Moreover, a bypass line 5 capable of circulating the gas and refluxing the deionized water splashed on the mist preventing plate 3 to the surface of the water in the lower side of the mist preventing plate 3 is installed.
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