| 摘要 |
PROBLEM TO BE SOLVED: To provide a light intensity measuring method and a light intensity measuring instrument capable of measuring precisely light intensity of reflected light from an inspection object, even when an influence by disturbance light is great, and a film thickness measuring instrument using the same. SOLUTION: When light is emitted from a light source 42 to the inspection object 40 in order to measure a condition of the inspection object 40, and when intensity variation of the reflected light is measured by a light receiving part 44, the irradiation light from the light source 42 is received by a light receiving part 45, or the reflected light from a reference face of the inspection object 40 is received by the light receiving part, and light intensity of the light source 42 is controlled by a light source control part 48 to bring light intensity of received light in the emission light from the light source or the reflected light from the reference face into a target light intensity level.
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