| 摘要 |
PROBLEM TO BE SOLVED: To provide an examining method and a scanning electron microscope capable of improving a fading (decoloring) characteristic of a fluorescent colored substance in a test sample, especially a test sample excitable in an ultraviolet spectrum area, for carrying out simultaneous multicolor detection. SOLUTION: This examining method for the test sample having at least two optical excitation lines and optically excitable with light at a first wavelength and light at a second wavelength at least is carried out through the following steps: a step of irradiating the test sample 27 with illuminating light 15 having a wavelength of several-fold of the first wavelength and that of several-fold of the second wavelength at least and focusing the illuminating light 15 on partial areas of the test sample 27, a step of sequentially guiding the illuminating light 15 along a plurality of the partial areas for scanning the test sample 27, a step of detecting detection light 29 arriving from the test sample 27, a step of converting the detection light 29 into a detection signal having an amplitude depending on power or intensity of the detection light 29, a step of arranging the detection signal to a plurality of scanned partial areas, and a step of displaying the detection signal on a display.
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