| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a ceramic joined material formed by laminating and joining a ceramic base material and a conductive plate without using a high-temperature process. SOLUTION: The ceramic joined material 20 is obtained by subjecting the surfaces facing each other of a conductive plate 26 and a ceramic base material 28 housed in a recessed part 34a of a cylindrical body section of a vessel to activation treatment under an extremely low pressure, touching, superposing and laminating the flanged section 34b and the conductive plate 36 of the cylindrical body section of the vessel in the state of housing the ceramic base material 28, hermetically press welding the flanged section in a vacuum or reduced pressure state to form the hermetic vessel 30 and subjecting this hermetic vessel 30 to isostatic pressurizing thereby laminating and joining the conductive plate 26 and the ceramic base material 2.
|
