| 摘要 |
PURPOSE: An electrostatic actuator is provided to increase the electrostatic attraction by reducing a distance between deserted charges by positioning an auxiliary electrode of a plurality of layers between a main electrode and an actuation body, thereby keeping equal or larger actuation range with a lower driving voltage. CONSTITUTION: An electrostatic actuator includes an insulating substrate(110), a main electrode(120) mounted to a predetermined portion on a surface of the substrate to be applied with a positive or negative electric charge from the outside, an auxiliary actuation part(130) mounted on the substrate and having an auxiliary electrode(131) of which a bottom surface faces a top surface of the main electrode, so that a predetermined area of the auxiliary electrode moves toward the main electrode by electrostatic attraction between the main electrode and the auxiliary electrode as an electric charge of different polarity from the charge applied to the main electrode is applied to the auxiliary electrode, and a main actuation part(140) formed of a conductive material to be mounted on the substrate and having an actuation body(141) of which a bottom surface faces a top surface of the auxiliary electrode, so that a predetermined area of the actuation body moves toward the auxiliary electrode by electrostatic attraction between the main electrode and the auxiliary electrode as an electric charge of different polarity from the charge applied to the auxiliary electrode is applied to the actuation body from the outside.
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