| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a ceramic sliding member which is capable of additionally improving the water-tightness between a sliding surface of the ceramic sliding member manufactured through a carbon film depositing process step in succession to a firing process step and a sliding surface slidingly contacting another member to be slid. SOLUTION: The method of manufacturing the ceramic sliding member comprising a powder molding step A of press molding oxide-base ceramic powder, a firing step B1 of firing the precursor molding at a temperature higher than 1,400 deg.C, a polishing step C of forming the polished surface by subjecting the sliding surface to polishing, an etching step E of subjecting the polished surface to chemical etching and the carbon film depositing step F of depositing the carbon film on the polished surface by pyrolyzing the organic matter, in which the fired compact is subjected to annealing prior to polishing of the fired compact to prevent the ceramic sliding member from developing an internal stress in the carbon film depositing step and giving rise to the distortion of the external form.
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