| 发明名称 |
CERAMIC BOARD |
| 摘要 |
An objective of the present invention is to provide a ceramic substrate making it possible to control its heating face into even temperature even if through holes into which lifter pins, supporting pins and the like will be inserted are made. The present invention is a ceramic substrate having: a heating element composed of one or more circuit (s) on a surface thereof or inside thereof; and a through hole being made in the ceramic substrate, wherein the heating element circuit is formed in the range of 20 mm or less from the inner wall of the through hole. <IMAGE>
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| 申请公布号 |
EP1280380(A1) |
申请公布日期 |
2003.01.29 |
| 申请号 |
EP20010919825 |
申请日期 |
2001.04.09 |
| 申请人 |
IBIDEN CO., LTD. |
发明人 |
HIRAMATSU, YASUJI;ITO, YASUTAKA |
| 分类号 |
H01L21/00;H01L21/683;H05B3/26;H05B3/28;(IPC1-7):H05B3/10;H05B3/20;H05B3/68;H05B3/16;H01L21/68;H01L21/66 |
主分类号 |
H01L21/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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