| 摘要 |
PURPOSE: A time delay valve attached with a flow rate control valve and an impurity removal assembly of a wire bonder are provided to accurately supply air by installing a flow rate control valve on a path between an air input terminal and an air cut-off timer and to remove impurities by using vacuum pressure. CONSTITUTION: An exhaust port is formed on a path between an air output terminal and an air cut-off timer of a time delay valve(20). A flow rate control valve(30) is installed in the exhaust port. An impurity removal assembly of a wire bonder comprises an upper body having a fitting hole and an installation hole for a middle body, the middle body having a vacuum supply hole connected with a vacuum supply unit and an air supply hole connected to the air output terminal, and a lower body having a combining hole for combination of the middle body, a vacuum hole communicated with the vacuum supply hole, and air inject holes communicated with the air supply hole of the middle body. Upon injecting air to a member(40), the impurities on the member are flown. Then, the impurities are absorbed by the vacuum pressure.
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