A method and apparatus for infrared pyrometer calibration in a thermal processing system,申请号EP19960112107-传众专利搜索

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发明名称	A method and apparatus for infrared pyrometer calibration in a thermal processing system
摘要
申请公布号	EP0756159(B1)	申请公布日期	2003.01.29
申请号	EP19960112107	申请日期	1996.07.26
申请人	APPLIED MATERIALS, INC.	发明人	YAM, MARK
分类号	G01K15/00;G01J5/00;G01J5/02;G01J5/52;H01L21/66;(IPC1-7):G01J5/52	主分类号	G01K15/00
代理机构		代理人
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