SUBSTRATE DEVICE AND METHOD OF MANUFACTURING THE SAME, ELECTRO-OPTIC DEVICE AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To prolong the life of a substrate device adequately used for liquid crystal devices, etc., of a driving circuit built-in type having transistors(TRs) for switching pixels and driving circuits including the TRs and to perform high-grade image display. SOLUTION: This substrate device has pixel electrodes and the first TRs connected to the pixel electrodes in an image display region on the substrate and has wiring for driving the first TRs and the second TRs constituting a portion of the driving circuits connected to the wiring in a peripheral region on the substrate. First gate insulating films constituting the first TRs are formed of oxide films into which nitrogen is not introduced. Second gate insulating films constituting the second TRs are formed of oxynitride films into which the nitrogen is introduced.