| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical switch, having a micromirror which has high precision of planarity of the mirror surface and that of perpendicularity to a silicon substrate surface. SOLUTION: The method for manufacturing an optical switch which has a mirror-forming substrate, where the micro mirror for reflection of an optical signal is formed in a substrate body as one body is provided with a step where a micromirror precursor is formed by RIE of the silicon substrate and a step where a mirror surface is formed on the micro mirror precursor through anisotropic wet etching of the silicon substrate, where the micro mirror precursor is formed. |
