| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that residue in vapor deposition has been generated when a composite vapor deposition material consisting of aluminum and a metallic compound is vacuum-deposited by using a boat for vacuum deposition of a boron nitride material. SOLUTION: The boat for vacuum deposition obtained by coating at least a part mounted with the composite vapor deposition material in the boron nitride material coated with any of tungsten, tantalum and molybdenum in a thickness of >=20μm is used.
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