发明名称 |
IMAGE PROCESSING METHOD, IMAGE PROCESSOR AND BONDING DEVICE |
摘要 |
PURPOSE: To highly accurately detect a position without performing pattern matching in a rotating direction even in the case that a detection object is arranged in a posture including a position deviation in the rotating direction and to efficiently execute the generation of a mask pattern. CONSTITUTION: Inter-image subtraction is performed between a detection object image and a template image decided by a reticule mark 42 and a mark pattern image is generated/stored by utilizing the result (area hatched). In runtime, the area corresponding to the mask pattern image is excluded from the object of pattern matching. |
申请公布号 |
KR20030009166(A) |
申请公布日期 |
2003.01.29 |
申请号 |
KR20020041521 |
申请日期 |
2002.07.16 |
申请人 |
KABUSHIKI KAISHA SHINKAWA |
发明人 |
SUGAWARA KENJI |
分类号 |
G01B11/00;G06K9/64;G06T1/00;G06T7/00;G06T7/60;H01L21/60 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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