发明名称 IMAGE PROCESSING METHOD, IMAGE PROCESSOR AND BONDING DEVICE
摘要 PURPOSE: To highly accurately detect a position without performing pattern matching in a rotating direction even in the case that a detection object is arranged in a posture including a position deviation in the rotating direction and to efficiently execute the generation of a mask pattern. CONSTITUTION: Inter-image subtraction is performed between a detection object image and a template image decided by a reticule mark 42 and a mark pattern image is generated/stored by utilizing the result (area hatched). In runtime, the area corresponding to the mask pattern image is excluded from the object of pattern matching.
申请公布号 KR20030009166(A) 申请公布日期 2003.01.29
申请号 KR20020041521 申请日期 2002.07.16
申请人 KABUSHIKI KAISHA SHINKAWA 发明人 SUGAWARA KENJI
分类号 G01B11/00;G06K9/64;G06T1/00;G06T7/00;G06T7/60;H01L21/60 主分类号 G01B11/00
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