发明名称 METHOD OF DETECTING JUMPING OUT OF OBJECT TO BE INSPECTED FROM PALLET, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PURPOSE: To provide a method of detecting jumping out of object to be inspected from pallet that is improved, so as to detect the jumping out of objects to be inspected from pallets, with high accuracy and to reduce the breakage rate of sockets. CONSTITUTION: Pallets 2 are transported, while objects 1 to be inspected are respectively put in a plurality of pockets provided on the surface of each pallet 2. The reflection levels of the objects 1 put in the pockets are measured, by means of a reflection-type photoelectric sensor at each pallet 2. The maximum and minimum values of the reflection levels of the objects 1 carried on each pallet are found from the data about the reflection levels of the objects 1, and the amplitude of the variation of the reflection levels, which is the difference between the maximum and minimum values, is calculated. Then whether or not the amplitude is larger than a preset discrimination threshold is determined, by comparing the amplitude with the threshold.
申请公布号 KR20030009112(A) 申请公布日期 2003.01.29
申请号 KR20020022668 申请日期 2002.04.25
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 IJICHI TOSHIYA;SEMBA SHINJI
分类号 G01R31/26;G01N21/956;(IPC1-7):G01R31/26 主分类号 G01R31/26
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