SEMICONDUCTOR INSPECTION SYSTEM AND INSPECTION METHOD

摘要

PURPOSE: To provide a semiconductor inspection method for easily inhibiting the signal delay difference among a plurality of signals that are outputted from a semiconductor inspection apparatus. CONSTITUTION: A device under test(DUT) 50 is installed on one face of a socket board 30. Additionally, an auxiliary inspection apparatus 200 for adjusting the timing of a light signal that is transmitted from a semiconductor inspection apparatus 1 is installed on the other face of the socket board 30. In this case, I/O pins 201 of the auxiliary inspection apparatus 200 corresponding to the I/O pins 51 of the DUT 50 to be inspected are connected via a through hole 33 of the socket board 30 in a one-to-one relationship.