发明名称 |
MOCVD of SBT using tetrahydrofuran-based solvent system for precursor delivery |
摘要 |
A precursor composition useful for liquid delivery MOCVD, including SBT precursors dissolved in a solvent system containing tetrahydrofuran. The associated liquid delivery MOCVD process may be carried out with vaporization of the precursor composition on a porous vaporization element having an average pore diameter in the range of from about 50 to about 200 micrometers, with the resultant precursor vapor being admixed with a carrier gas to achieve high efficiency formation of SBT films.
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申请公布号 |
US6511706(B1) |
申请公布日期 |
2003.01.28 |
申请号 |
US19990441694 |
申请日期 |
1999.11.16 |
申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC. |
发明人 |
HENDRIX BRYAN C.;BAUM THOMAS H.;DESROCHERS-CHRISTOS DEBRA A.;ROEDER JEFFREY F.;PAW WITOLD |
分类号 |
C07F9/94;C23C16/18;C23C16/40;C23C16/448;G01T5/08;G02B6/02;G02B6/036;H01L39/24;(IPC1-7):C23C16/40 |
主分类号 |
C07F9/94 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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