发明名称 RF-powered plasma accelerator/homogenizer
摘要 The RF-powered plasma accelerator/homogenizer produces a quiescent plasma having a generally homogenous preselected plasma potential VPA and a space-charge neutralized plasma beam. The plasma accelerator/homogenizer includes an RF-conductive accelerator/homogenizer structure (17) having a plurality of dielectric-coated accelerator/homogenizer surfaces (619) with total surface area ARF and a containment assembly that includes an RF-grounded structure (112) with a total ground surface area AG, where ARF>AG. The accelerator/homogenizer structure is reactively coupled to an RF source using various approaches for direct or stray capacitive coupling (16). The RF voltage induced on the accelerator/homogenizer surfaces oscillates around a positive offset voltage determined by (ARF/AG)x, where x is not greater than 4, and causes the surfaces to absorb thermal electrons from the diffusing primary plasma, producing a homogenous quiescent plasma at preselected plasma potential VPA, which is approximately equal to the positive value of the offset RF voltage.
申请公布号 US6512333(B2) 申请公布日期 2003.01.28
申请号 US20010017730 申请日期 2001.12.14
申请人 CHEN LEE 发明人 CHEN LEE
分类号 H05H3/02;(IPC1-7):H05H1/54 主分类号 H05H3/02
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