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发明名称
摘要
申请公布号	JP3370929(B2)	申请公布日期	2003.01.27
申请号	JP19980098994	申请日期	1998.04.10
申请人		发明人
分类号	H01L31/10;H01L21/338;H01L27/095;H01L29/778;H01L29/812;(IPC1-7):H01L21/338	主分类号	H01L31/10
代理机构		代理人
主权项
地址

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