DISTORTION COMPENSATING METHOD OF ELECTRON-RAY DEFLECTION, ELECTRON-RAY EXPOSURE DEVICE WHICH HAS DEFLECTION DISTORTION COMPENSATING MEANS, AND SCANNING TYPE ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To carry out distortion compensation with high precision in a deflection distortion compensating method, which compensates the deflection distortion at the time of deflecting the electron ray and drawing an image. SOLUTION: Providing a mark pattern which has 2-dimensional periodic structure in order to compensate deflection amount and the distortion during electron-ray scanning, scanning the electron ray so that the mark pattern, which has the periodic structure, may have an angle, making an interference-fringe pattern generate, and observing this interference-fringes pattern make distortion compensation, which has higher accuracy than before, enable.