| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe scanning device preventing a temperature drift by reducing the generation quantity of heat of a voice coil motor. SOLUTION: The voice coil motor 3 includes a motor core 30, comprising a cylindrical pole piece 31 and a permanent magnet 32, a voice coil movable element 33 inserted in the leading end of the pole piece 31 to be wound around a voice coil 34 and motor yokes 36 and 37, housing the motor core 30 and forming a magnetic path crossing the voice coil 34 of the voice coil movable element 33. A cooling pipe 38 is housed in the gap between the insides of the motor yokes 36 and 37 and the motor core 30. The cooling pipe 38 is arranged in an annular form along the outer periphery of the pole piece 31 and is fixed to the inside of the motor yoke 36 by a heat conductive filling material 39. A cooling medium is refluxed into the cooling pipe 38.
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