OPTICAL MODULATION ELEMENT, GLV DEVICE, AND LASER DISPLAY

摘要

PROBLEM TO BE SOLVED: To provide an optical modulation element having a light reflection film-cum-membrane side electrode with a uniform film thickness and high light reflectance. SOLUTION: The optical modulation element 30 is constituted as an optical modulation element which constitutes a GLV device and has the same structure as a conventional optical modulation element excluding the different structure of the light reflection film-cum-the membrane side electrode 34 of a membrane 32. The light reflection film-cum-membrane side electrode is composed of two- layer metal film of a TiN film 36 provided as a lower layer and having a film thickness of 10 nm to 70 nm and an Al film 38 provided thereon and having a film thickness of 50 nm to 150 nm. The optical modulation element has high light use efficiency because the light reflection film-cum-membrane side electrode has a flat and smooth reflective surface of the Al film 38 and exhibits high light reflectance.