SUBSTRATE WITH ITO COATING FILM AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a substrate with an ITO(indium tin oxide) coating film with excellent alkali resistance and adhesion property and a method for manufacturing the same. SOLUTION: The substrate with the ITO coating film has a structure with a color filter 102, an organic protective film 103, intermediate layers 104a, 104b and the ITO coating film 105 patterned with a pattern of electrodes layered on a surface of a glass substrate 101 from the bottom in this order. The intermediate layer 104a is deposited on the surface of the organic protective film 103 with a high frequency sputtering method using Ar as an introducing gas and is composed of a metal oxide hardly soluble in alkali. The intermediate layer 104b is deposited with a reactive sputtering method or with the high frequency sputtering method and is composed of a metal oxide or a metal nitride hardly soluble in alkali.