发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT
摘要 PROBLEM TO BE SOLVED: To provide a high accuracy semiconductor integrated circuit for which the variation of a finished dimension is suppressed and the finished dimension is uniformized. SOLUTION: For the circuit to be wired on wiring lattices e and f provided on the semiconductor integrated circuit beforehand, a dummy wiring g of the same wiring width as with signal wiring is provided on the wiring lattice e adjacent to the respective pieces of the signal wiring b-1, b-2, b-3 and b-4.
申请公布号 JP2003023079(A) 申请公布日期 2003.01.24
申请号 JP20010208630 申请日期 2001.07.10
申请人 MITSUBISHI ELECTRIC CORP 发明人 SHIRATA SHINYA;TAKIMOTO ISAO
分类号 H01L21/822;H01L21/82;H01L27/04;(IPC1-7):H01L21/82 主分类号 H01L21/822
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