发明名称 |
PHOTOMASK, METHOD OF PRODUCING PHOTOMASK, AND METHOD OF MAKING PATTERN USING PHOTOMASK |
摘要 |
An isolated light-shielding pattern formed from a light-shielding film region 101 and a phase shift region 102 is formed on a transparent substrate 100 serving as a mask. The phase shift region 102 has a phase difference with respect to a light-transmitting region of the transparent substrate 100. Moreover, the width of the phase shift region 102 is set such that a light-shielding property of the phase shift region 102 becomes at least about the same as that of a light-shielding film having the same width. <IMAGE> |
申请公布号 |
KR20030008211(A) |
申请公布日期 |
2003.01.24 |
申请号 |
KR20027005919 |
申请日期 |
2000.11.02 |
申请人 |
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发明人 |
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分类号 |
G03F1/00;G03F1/26;G03F1/29;G03F1/30;G03F1/32;G03F1/36;G03F1/68;G03F1/76 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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