| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump capable of preventing breakdown of a rotor due to corrosion and preventing damage due to contact between the rotor and the fixed side by reducing deposition of products. SOLUTION: This vacuum pump comprises a pump case 1 opening a gas intake port in the upper surface, a rotor shaft 5 rotatably supported in the pump case 1, a plurality of rotor blades 10, 10, etc., that are stored in the pump case 1 and disposed on the outer peripheral surface 8a of the rotor 8 fixed to the rotor shaft 5, a plurality of stator blades 11, 11, etc., that are positioned alternately among the plurality of rotor blades 10, 10, etc., and fixed in the pump case 1, and a driving motor 9 for rotating the rotor shaft 5. Corrosion preventing film layers 15 are formed on the inner peripheral surface 8b and the outer peripheral surface 8a of the rotor 8, part of the inner peripheral surface 8b or the outer peripheral surface 8a of the rotor 8 is scraped to form a balancing hole 16, and a thermosetting resin film layer 17 is formed on the surface of the balancing hole 16 as an anticorrosion treatment. |
