SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSOR, DEVICE INFORMATION MANAGEMENT METHOD, PROGRAM AND RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing system by which operation information can instantaneously be browsed from a remote place when a fault of the substrate processor occurs. SOLUTION: The substrate processing system 10 is provided with a substrate processor 1, an information storage server 2 and a support computer 3, which are connected to a network 6 respectively. When the fault is generated in the substrate processor 1, an alarm processing part 122 extracts a required related log file 262 and stores it in a fixed disk 24 of the information storage server 2. Furthermore, fault in formation is generated by a fault information generating part 123 and finally stored in the fixed disk 24 of the information storage server 2 as a fault information DB 261. The related log file 262 and the fault information DB 261 are made possible to be browsed from the support computer 3 at the remote place by a device information disclosing means 226. Thus, the related log files 262 and the fault information DB 261 can instantaneously be browsed.