| 摘要 |
PROBLEM TO BE SOLVED: To shorten a time for adjusting environments in both load-locking chambers. SOLUTION: A method for conveying/delivering a substrate comprises a step of synchronizing the timing of placing a conveying substrate in the load- locking chamber 3 by a conveying robot 14 in, for example, a coater developer 2 with the timing of placing a delivering substrate in the load-locking chamber 4 by a conveying robot 13 in an exposure apparatus 1 when the substrates 11, 12 are conveyed and delivered to the exposure apparatus via the chambers 3, 4; steps of closing the chambers 3, 4 at the stages of placing both the conveyed and delivered substrates in the chambers 3, 4, communicating with the environments of the chambers 3, 4 by opening a valve 17 of a communication tube 16, thereby making the internal environments uniform, thereafter closing the valve 17, and adjusting the environments in the chambers 3, 4 to intended states. |
