发明名称 CDM TESTING DEVICE
摘要 PROBLEM TO BE SOLVED: To solve the problem that an atmospheric temperature and a humidity under a test work can not be set freely in a conventional CDM testing device. SOLUTION: This CDM testing device 10 is equipped with a table 14 for loading a work 13 replaceably, a voltage application part 20 for applying a voltage for generating discharge between itself and the work 13, and a cover 22 for covering the voltage application part 20 and the table 14. The device is also equipped with a temperature adjusting means for setting a working space 23 enclosed by the cover 22 at a prescribed temperature, a humidity adjusting means for setting the working space 23 at a prescribed humidity, a heat insulating member disposed to enclose the working space 23, a transparent work confirmation window 24 formed on a part of the cover 22, a condensation preventing means relative to the work confirmation window 24, a drainage hole 26 formed on the floor surface and facing to the working space 23, and a drainage channel 27 for draining waterdrops accumulated in the working space 23 from the drainage hole 26 to the outside of the working space 23.
申请公布号 JP2003021662(A) 申请公布日期 2003.01.24
申请号 JP20010208305 申请日期 2001.07.09
申请人 CANON INC 发明人 OISHI TOSHIYUKI
分类号 G01R31/26;G01R31/12;G01R31/16;G01R31/30;H01L21/66;(IPC1-7):G01R31/26 主分类号 G01R31/26
代理机构 代理人
主权项
地址