| 摘要 |
PROBLEM TO BE SOLVED: To permit the arrangement of a temperature sensor 28 at the optimum position while surely maintaining a processing atmosphere in a stabilized condition. SOLUTION: A cooling roll is provided with a vacuum vessel 1 set in the processing atmosphere different from an external atmosphere, a roll structural body 4 for cooling the objective matter 40 to be cooled, a pipeline mechanism such as an outside pipeline 11 for conducting a cooling refrigerant to flow through the roll structural body 4 from outside, a pipeline supporting mechanism 20 for supporting rotatably the pipeline mechanism to the bulkhead of the vacuum vessel 1 under a condition of air-tight and provided in the same with a sealed space 19, the temperature sensor 28 provided on the roll structural body 4 so as to detect the temperature of the roll structural body 4, and a signal line 27 wired in the outside of the roll through the sealed space 19 to output the detecting signal of the temperature sensor 28 to the outside of the vessel.
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