| 摘要 |
PROBLEM TO BE SOLVED: To provide a tilt adjustment method and a device thereof with high precision, high rigidity, low center of gravity, high load resistance and superior to conventional arts in vibration stability in a standstill condition, and showing effectiveness especially in fine angle tilt adjustment less than±a few degree. SOLUTION: This tilt adjustment device includes a base part, a movable surface opposing to the base part, at least one universal joint connecting the base part and the movable surface, at least three arms controllable in telescopic motion connected to the base part and the movable surface, and an arm driving mechanism.
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