| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating apparatus and a coating method which can utilize properties of coating liquid, cope satisfactorily with difference in viscos ity, apply treatment agent to a necessary part only, select wide ranges of viscosities, types, etc. of treatment agent, and relieve the mechanical precision such as precision of gaps between nozzles and a board, dimensional precision of the nozzles, etc. SOLUTION: A board G is held by a spin chuck 15. Resist liquid is supplied from a plurality of resist nozzles 61a, 61a... formed in a lower surface of a resist pipe 61 laid across the surface of the board G in a first direction, to the surface of the board G at a plurality of positions with prescribed intervals between each other. A thin and uniform resist coating film can be formed by utilizing properties of resist liquid itself. |
