SINGLE C-AXIS PGO THIN FILM ELECTRODE WITH SUPERIOR SMOOTH SURFACE AND UNIFORMITY AND ITS FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a (c) axis orientation single crystal PGO ferroelectric thin film whose thickness is uniform on a metal electrode. SOLUTION: This forming method is a method for forming an electrode and the ferroelectric thin film on the electrode, and consists of a process for forming a substrate and a process for depositing the electrode on the substrate. The electrode is formed of material obtained from material group composed of iridium and iridium composite. A process for forming the ferroelectric thin film includes a process wherein the film shows the smooth surface and uniform thickness.