发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要 PROBLEM TO BE SOLVED: To reduce a current consumption by decreasing a leakage current of a memory cell of a semiconductor integrated circuit device such as, for example, an SRAM. SOLUTION: The semiconductor integrated circuit device comprises drive n-channel MISFETs (Qd1, Qd2) and load p-channel MOSFETs (Qp1, Qp2), each of which has an input unit and an output unit. The input unit and the output unit each has a pair of inverters cross connected to each other. Each of the n-channel MISFETs and the p-channel MOSFETs has gate gates (well 3: Ap1, Ap2, well 4: An1, An2) in which a power source potential and a ground potential are applied. The SRAM of the semiconductor integrated circuit device further comprises a gate electrode G and a source region of these MISFETs of the SRAM memory cell having metal silicide layers (shaded part) formed thereon, and a metal silicide layer formed on a drain region. As a result, the leakage current of the MISFET generated from a potential difference between the drain and the well can be reduced.
申请公布号 JP2003023112(A) 申请公布日期 2003.01.24
申请号 JP20010207975 申请日期 2001.07.09
申请人 HITACHI LTD;HITACHI ULSI SYSTEMS CO LTD 发明人 FUNAYAMA KOTA;YOSHIDA YASUKO;NAKAMICHI MASARU;NISHIDA AKIO
分类号 H01L21/8238;H01L21/8244;H01L27/092;H01L27/11 主分类号 H01L21/8238
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