| 摘要 |
PROBLEM TO BE SOLVED: To provide an eddy current sensor, capable of stable operation and capable of detecting the end point of polishing with high accuracy. SOLUTION: An eddy current sensor 10 detects the film thickness of a conductive film, based on the change in the eddy current loss occurring at the conductive film. A sensor coil 11, which causes the eddy current at the conductive film, is integrally formed with an active element part 12 which is connected to the coil for oscillating variable frequency corresponding to the eddy current loss. |
