| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent a front surface or a non-laminating surface of an unlaminating part from being damaged by avoiding a contact of the non- laminating surface of the unlaminating part with a holder.when a first member such as a thin electronic component or the like is laminated to a second member such as a sheet or the like. SOLUTION: A lamination apparatus 10 comprises a table 14 for holding an element E to be coated, a sheet-holding means 15 provided relatively movable to the table 14 to hold the sheet S, and a pressing member 17 for imparting a predetermined pressing force to the sheet S superposed on the element E by the relative movement of the table 14 and the holding means 15. The holding means 15 has a holder 23 for holding a surface S2 side of the unlaminating part N1 of the sheet S in a non-contact state. Accordingly, the holder 23 can be shifted in its surface direction in the non-contact state on the surface S2 of the sheet S in association with the movement of the means 15.</p> |
