| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample production apparatus and a sample producing method, in which cross-sectional processing at an arbitrary angle is possible, in the ion beam processing in a non-inclining sample stand. SOLUTION: The sample production apparatus is constituted so that a sample section may be formed by ion beam processing in the sample 1 held to the sample stand 2 using an ion beam optical system 5 which converges, scans, and deflects the ion beam 4 emitted from the ion source 9. It is constituted so that the angle, which is made by an ion beam optical axis of the ion beam optical system 5 and the sample stand 2 surface, may be fixed, and formation of the sample section may be controlled by rotation within the sample stand surface of the sample stand 2. With the apparatus arrangement by the non- inclining sample stand effective in reduction of apparatus manufacturing cost, the ion beam irradiation processing at arbitrary angles is attained, and an accurate section can be formed.
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