| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film coil module, its manufacturing method and its using method which is superior in heat radiation characteristic and hence allows a high current to flow. SOLUTION: The thin film coil module comprises a thin film coil array 1 of thin film coil elements C arranged in a two-dimensional matrix and buried in a coil insulation member, a diode array 3 of diodes D arranged in a matrix synchronous with the matrix layout of the coil elements, and a heat sink 2 made of a high heat conductive material. The heat sink is sandwiched between the arrays 1, 3. The coil insulation member is a diamond thin film 1i.
|
