APPARATUS FOR MANUFACTURING OZONE

摘要

PROBLEM TO BE SOLVED: To enhance the production speed of liquid ozone by using ozone gas in high efficiency. SOLUTION: Temperature-controllable auxiliary chambers 32, 33 are arranged on the supply and exhaust paths of ozone gas from an ozonizer 31 to an ozone chamber 30, respectively. The liquid ozone is accumulated in the chamber 30 by carrying out the following steps while opening/closing valves 39, 40. One step is that the ozone gas from the ozonizer 31 is supplied to the chamber 30 through the first chamber 32 or 33 whose temperature is controlled to vaporize the liquid ozone accumulated preliminarily and the ozone gas in the chamber 30 is exhausted through the second chamber 33 or 32 whose temperature is controlled to liquefy the ozone gas. The other step is that the ozone gas from the ozonizer 31 is supplied to the chamber 30 through the second chamber 33 or 32 whose temperature is controlled to vaporize the liquid ozone accumulated preliminarily and the ozone gas in the chamber 30 is exhausted through the first chamber 32 or 33 whose temperature is controlled to liquefy the ozone gas.