| 摘要 |
<p>PROBLEM TO BE SOLVED: To smoothly proceed a process while bending around the tip side of a movable substrate generated in a heating process of oven heating or the like does not need to be cooled during the period for the bending to be returned by inversing the movable substrate by 180 deg. and by supplying it to the next process. SOLUTION: As for the bending around the tip side of the movable substrate generated in the heating in the oven heating after a photoresist layer 22 is coated by a roll coater, by inversing the movable substrate 2 by 180 deg. and by supplying it to the next process, the movable substrate 2 having the bending becomes to be supplied to the next process without a waiting time.</p> |
