发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To obtain a semiconductor device having a MOSFET capable of realizing both hot carrier suppression and large current driving force, and to provide a manufacturing method therefor. SOLUTION: A T-shaped electrode 3 comprises a first gate electrode section 3a equivalent to a portion 'I' in a lower section, and a second gate electrode section 3b equivalent to a portion '-' in an upper section. First side wall spacers 7 and first side walls 8 are so formed as to be adjacent to the side walls of the electrode section 3a and as to be below the electrode section 3b. Below the side walls 8, one part of extension regions 15 is positioned through the spacers 7. The side walls 8 are formed of a high-permittivity material having a higher permittivity than that of a silicon oxide film.
申请公布号 JP2003023147(A) 申请公布日期 2003.01.24
申请号 JP20010206393 申请日期 2001.07.06
申请人 MITSUBISHI ELECTRIC CORP 发明人 NAGAHISA KATSUMI
分类号 H01L29/417;H01L21/8234;H01L27/088;H01L29/78;(IPC1-7):H01L29/78;H01L21/823 主分类号 H01L29/417
代理机构 代理人
主权项
地址