| 摘要 |
PROBLEM TO BE SOLVED: To provide a discharge plasma processing device where an electrode of an ion-based metal used for it is lightened, while maintaining rigidity, heat resistance and discharge characteristics. SOLUTION: In this discharge plasma processing device, a solid dielectric is installed on at least either one of facing surfaces of electrodes facing each other, and a discharge plasma is generated by applying electric field between the electrodes. A material obtained by lighting an iron-based metal is used as a material for the electrodes. |
