| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device automatic inspection device capable of inspecting, highly accurately and efficiently, a semiconductor device to which a cable is connected. SOLUTION: This semiconductor device automatic inspection device 10 comprises a tray 20 for holding the semiconductor device 18, a conveyance device 24 for conveying successively the tray 20 to an inspection area 22 in the holding state of the semiconductor device 18, an inspection connector 26 to be automatically coupled with a connector 16 in the held state by the tray 20, a probe 28, a transfer device 30 for transferring the tray 20 toward the probe 28, and thereby allowing a terminal 14A of a device body 14 and a terminal 28A of the probe 28 to approach mutually, and inspection equipment 32 for inspecting the semiconductor device 18 by inputting an input signal from the inspection connector 26 and by acquiring an output signal from the probe 28.
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