SEMICONDUCTOR GAS SUPPLY SYSTEM

摘要

PURPOSE: A semiconductor gas supply system is provided to inspect a gas supply line and a filter by determining whether a resistance value of the gas obtained from a resistance detecting sensor falls outside an allowable error scope of a reference value. CONSTITUTION: The gas supply system transfers the gas contained in a gas storage tank(20) to a process chamber through a gas supply line. A detecting unit is formed in the gas supply line. The detecting unit compares the reference resistance of the gas flowing inside the gas supply line with the reference resistance of the gas contained in the gas storage tank to determine whether leaks or impurities in the gas supply line is properly filtered. The detecting unit informs a process operator of whether the leak or impurities in the gas supply line is properly filtered.