发明名称 MODULAR INJECTOR AND EXHAUST ASSEMBLY
摘要 PURPOSE: An injector and exhaust assembly is provided to promote uniform distribution of gas by including at least two injectors for forming at least one exhaust channel between the injector and an exhaust assembly. CONSTITUTION: At least two injectors are positioned adjacent to each other and spaced apart to form at least one exhaust channel between therebetween. A mounting plate for securing the at least two injectors. Each of the at least two injectors is individually mounted to or removed from the mounting plate. The mounting plate is provided with at least one exhaust slot in fluid communication with the at least one exhaust channel. The exhaust assembly is coupled to the mounting plate to remove exhaust gases from the injectors.
申请公布号 KR20030007175(A) 申请公布日期 2003.01.23
申请号 KR20020040964 申请日期 2002.07.13
申请人 ASML US, INC. 发明人 DEDONTNEY JAY BRIAN;KURITA SAMUEL;MATTIESEN RICHARD
分类号 C23C16/44;C23C16/455;H01L21/205;(IPC1-7):H01L21/205 主分类号 C23C16/44
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