Induction magnet for generating magnetic field in semiconductor device manufacturing equipment, has body containing unitary parts of electrically insulating and magnetic material

摘要

An induction magnet comprises a body containing at least one unitary part of an electrically insulating and magnetic material. Independent claims are also included for: (a) a method of manufacturing an inducing magnet comprising transforming metallic magnetic material in bulk into a powder of particles of the metallic magnetic material, coating the particles of the powder with an electrically insulating material, compacting the particles of the powder into a mold to form a rigid body, sintering the body, and thermally treating the sintered body; and (b) semiconductor manufacturing equipment using high density plasma, comprising a reaction chamber having a plasma region, a support disposed in the chamber and dedicated to support a substrate, a reaction gas supplier positioned in the chamber, and the inventive induction magnet.