BUBBLER EQUIPPED WITH AUTOMATIC REFILL FUNCTION

摘要

PURPOSE: Provided is a bubbler equipped with an automatic refill function for refilling source materials without the stop of system when the sources in a source vessel are consumed. Accordingly, the bubbler shortens deposition time in production of photoelectric elements or optical fibers by deposition. CONSTITUTION: The bubbler for vaporizing source materials comprising a heating vessel(110), a cover(120) and a source vessel(113) made of stainless steel is operating by the following steps of: keeping the amount of source materials(SiCl4 or GeCl4) in a cylindrical source vessel constant by using a liquid-phase sensor(122); heating sources by heater set on the outside of the heating vessel; vaporizing sources by carrier gas and discharging the vaporized sources for supplying to a chamber. A carrier gas inflow tube(121) is set near bottom of the source vessel, the liquid-phase sensor is set on the liquid phase of sources in the vessel, and a thermometer(123) is positioned in the depth more than half of sources.